Konstrukcija vakuumske komore za umjeravanje mjerila tlaka

master's thesis

• Title (english): Vacuum chamber design for calibration of pressure sensors
• Author: Petar Zeljko
• Mentor: Lovorka Grgec-Bermanec (mentor)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2022-07-20, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering; Process Energy Engineering

Abstract

U uvodnom dijelu ovog rada dana je kratka povijest, fizikalne osnove te podjela vakuuma. Zatim je dan pregled procesa koji otežavaju postizanje vakuuma. U drugom dijelu rada dana je fizika rada vakuum pumpi te su opisane metode generiranja vakuuma. Opisane su vakuum pumpe za postizanje grubog i srednjeg vakuuma te pumpe za visoki i ultra visoki vakuum. Iza toga dan je pregled mjerila vakuuma te mogući načini njihovog umjeravanja uz teorijske opise procesa. Središnji dio rada opisuje proces konstrukcije i izrade vakuum komore te proces nabavke materijala za samu komoru. U zadnjem dijelu rada prikazana su provedena mjerenja te pokazane dostupne vakuum pumpe, vakuum mjerila i načini njihovog spajanja. Prva mjerenja vezana su uz karakterizaciju dostupnih vakuum pumpi (koji tlak mogu postići i koliko im vremena treba). Konačno u završnom dijelu rada dan je primjer umjeravanja piranijevog mjerila vakuuma s rezultatima provedenih mjerenja.

Abstract (english)

In the introductory part of this theis, a brief history, physical basis and classification of the vacuum is given. After that an overview of the processes that make it difficult to achieve a vacuum is given.. In the second part of the thesis, the physics of vacuum pump operation is given, and vacuum generation methods are described. Vacuum pumps for achieving rough and medium vacuum and pumps for high and ultra high vacuum are described. This is followed by an overview of vacuum gauges and possible methods of their calibration along with theoretical descriptions of the process. The central part of the theis describes the process of construction and production of the vacuum chamber and the process of procurement of materials for the chamber itself. In the last part of the paper, the measurements are presented and the available vacuum pumps, vacuum gauges and ways of connecting them are shown. The first measurements are related to the characterization of available vacuum pumps (what pressure they can achieve and how long they take). In the final part of the paper, an example of the calibration of the pirani vacuum gauge with the results of the measurements is given.

• Keywords: generiranje vakuuma; mjerila vakuuma; vakuum komora; karakterizacija vakuum pumpe; umjeravanje vakuummetra
• Keywords (english): vacuum generation; vacuum gauges; vacuum chamber; vacuum pump characterization; vacuum gauge calibration
• Language: croatian
• URN:NBN: urn:nbn:hr:235:050930
• Study programme: Title: Mechanical Engineering; specializations in: Design, Process and Energy Engineering, Production Engineering, Engineering Modelling and Computer Simulation, Marine Engineering, Industrial Engineering and Management, Materials Engineering, Mechatronics and Robotics, Autonomous Systems; Course: Process and Energy Engineering; Study programme type: university; Study level: graduate; Academic / professional title: magistar/magistra inženjer/inženjerka strojarstva (magistar/magistra inženjer/inženjerka strojarstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Open access
• Created on: 2022-07-11 09:02:21