Procjena sastavnica mjerne nesigurnosti prostornih parametara topografije dobivenih primjenom mikroskopa atomskih sila

master's thesis

• Title (english): Evaluation of measurement uncertainty components of areal topography parameters obtained using an atomic force microscope
• Author: Lovro Turkalj
• Mentor: Biserka Runje (mentor)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2021-12-16, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering; Production Mechanical Engineering

Abstract

Površinska hrapavost definira se kao mikrogeometrijsko stanje površine (sveukupnost mikrogeometrijskih nepravilnosti) koja uključuje kratkovalne nepravilnosti površine te je posljedica proizvodnog procesa, odnosno rezultat je postupka obrade. Mjerenje hrapavosti provodi se primjenom 2D i/ili 3D mjernih sustava.
U teorijskom dijelu rada opisani su površinski (3D) parametri topografije koji su propisani normom ISO 25178-2:2012. Površinski parametri topografije rezultat su mjerenja dobivenih primjenom mikroskopa atomskih sila (AFM), koji je opisan u radu. U radu je provedeno mjerenje amplitudnih površinskih parametara topografije te su utvrđene utjecajne veličine na rezultat mjerenja.
Mjerna nesigurnost definirana je kao parametar pridružen rezultatu mjerenja koji opisuje rasipanje vrijednosti koje se pripisuju mjernoj veličini uz određenu vjerojatnost. U radu su navedene metode za procjenu mjerne nesigurnosti, a za odabrane utjecajne veličine procijenjene su sastavnice mjerne nesigurnosti.

Abstract (english)

Surface roughness is defined as the microgeometric condition of the surface (the totality of microgeometric irregularities) which includes shortwave surface irregularities, and is a consequence of the production process, that is a result of the processing procedure. Roughness measurement is performed using 2D and/or 3D measuring systems. The theoretical part of the thesis describes surface (3D) parameters of topography prescribed by ISO 25178-2:2012. Surface topography parameters are the result of measurements obtained using an atomic force microscope (AFM), which is described in the thesis. Amplitude parameters of surface topography were measured, and the influences on the measurement result were determined.
Measurement uncertainty is defined as a parameter associated with the measurement result that describes the scatter of the values attributed to the measured quantity with a certain probability. The thesis present methods for estimating measurement uncertainty, and the components of measurement uncertainty are estimated for selected influential quantities.

• Keywords: prostorni parametri topografije; mikroskop atomskih sila (AFM); mjerna nesigurnost
• Keywords (english): areal topography parameters; atomic force microscope (AFM); measurement uncertainty
• Language: croatian
• URN:NBN: urn:nbn:hr:235:097392
• Study programme: Title: Mechanical Engineering; Study programme type: university; Study level: graduate; Academic / professional title: magistar/magistra inženjer/inženjerka strojarstva (magistar/magistra inženjer/inženjerka strojarstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Embargoed access; Embargo expiration date: 2023-12-09
• Created on: 2021-12-10 18:20:46