Projekt postrojenja za pripremu ultračiste vode za industriju poluvodiča

master's thesis

• Title (english): Ultrapure water treatment plant design for semiconductor industry
• Author: Bruno Horvat
• Mentor: Hrvoje Juretić (mentor)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2023-12-06, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering; Process Energy Engineering

Abstract

Projektni zadatak ovog diplomskog rada bio je dimenzionirati postrojenje za pripremu ultračiste vode u industriji poluvodiča kapaciteta 175 m³/h pri čemu ultračista voda mora zadovoljiti zahtjeve relevantnih standarda. Proizvodni procesi u industriji poluvodiča zahtijevaju ogromne količine ultračiste vode u gotovo svakoj fazi. Obrada sirove vode na najvišu razinu kvalitete složen je proces koji uključuje niz tehnologija pročišćavanja i najčešće se sastoji od predobrade, u kojoj se uklanjaju suspendirane i koloidne tvari, postupka demineralizacije te završnog uklanjanja tvari u tragovima.
U uvodu ovog rada definirani su postavljeni zahtjevi na razinu kvalitete vode u industriji poluvodiča prema ASTM standardu. Opisan je način rada i izazovi postrojenja za proizvodnju ultračiste vode u industriji poluvodiča. Nadalje, teorijski su prikazani tehnološki procesi obrade vode koji se mogu primijeniti na industrijska postrojenja, ali i na male sustave.
U drugom dijelu rada dimenzionirano je postrojenje za proizvodnju ultračiste vode u industriji poluvodiča. Proračun ionskih izmjenjivača i membranskih sustava izrađen je uz pomoć računalnog programa Wave (Water Application Value Engine) američke tvrtke DuPont što je pomoglo u odabiru ispravnih konfiguracija tehnoloških procesa obrade vode uz zadovoljavanje svih zadanih parametara opreme. Proračuni tehnoloških procesa koji nisu obuhvaćeni ovim računalnim programom izrađeni su zasebno. Prikazan je utrošak kemikalija u tehnološkim procesima te utrošak energije potrebne za vođenje ovakvog postrojenja. Na kraju, priložena je tehnološka shema postrojenja te tlocrtni prikaz smještaja opreme.

Abstract (english)

The project task of this master's thesis was to design a facility for the preparation of ultrapure water in the semiconductor industry with a capacity of 175 m³/h, where ultrapure water must meet the stringent requirements of relevant standards. Manufacturing processes in the semiconductor industry require vast amounts of ultrapure water at almost every stage. Treating raw water to the highest level of quality is a complex process that involves a series of purification technologies, typically consisting of pretreatment, where suspended and colloidal substances are removed, demineralization, and final removal of trace substances.
In the introduction of this thesis, the requirements for the water quality level in the semiconductor industry according to ASTM standards were defined. The operation and challenges of the ultrapure water production facility in the semiconductor industry were described. Furthermore, a theoretical presentation of water treatment processes applicable to both industrial-scale facilities and smaller systems is provided.
In the second part of the thesis, the facility for the production of ultrapure water in the semiconductor industry was dimensioned. The calculation of ion exchangers and membrane systems was facilitated by the computer program Wave (Water Application Value Engine) from the American company DuPont. This program aided in selecting appropriate configurations of water treatment processes while adhering to all specified equipment parameters. Calculations for technological processes not covered by this computer program were done separately. The consumption of chemicals in technological processes and the energy consumption needed to operate such a facility were presented. Finally, a technological scheme of the facility, along with a floor plan showing the equipment layout, was provided.

• Keywords: ultračista voda; industrija poluvodiča; ionska izmjena; umekšavanje; reverzna osmoza; ionska izmjena miješanim filtrom; membransko otplinjavanje; UV oksidacija; ultrafiltracija
• Keywords (english): ultrapure water; semiconductor industry; ion exchange; softening; reverse osmosis; mixed bed ion exchange; membrane degasification; UV oxidation; ultrafiltration
• Language: croatian
• URN:NBN: urn:nbn:hr:235:949809
• Study programme: Title: Mechanical Engineering; Study programme type: university; Study level: graduate; Academic / professional title: magistar/magistra inženjer/inženjerka strojarstva (magistar/magistra inženjer/inženjerka strojarstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Open access
• Created on: 2023-12-05 10:05:54