Utjecaj načina šaržiranja obradaka na svojstva PACVD prevlaka

professional thesis

• Author: Ivan Smolčić
• Mentor: Franjo Cajner (mentor)
• Committee member: Darko Landek (predsjednik povjerenstva)
• Committee member: Franjo Cajner (član povjerenstva)
• Committee member: Hrvoje Ivanković (član povjerenstva)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2016-10-26, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering

Abstract

U teorijskome dijelu rada opisan je CVD postupak kemijskoga prevlačenja iz parne
faze (engl. Chemical Vapour Deposition), njegove fizikalno-kemijske osnove, podjela,
prednosti i nedostaci te primjena. Detaljno je opisan PACVD postupak s posebnim osvrtom na
utjecaj energije iona (plazme), položaja i geometrije uzorka u reaktoru PACVD uređaja na
kvalitetu prevlake.
U eksperimentalnome dijelu, uz navedene parametre prevlačenja TiN prevlake i
sastava osnovnog materijala (X38CrMoV5–3), prikazane su metode i detaljno analizirani
rezultati ispitivanja kvalitete prionjivosti prevlake Rockwell C testom, debljine prevlake
kalotestom i kemijskoga sastava TiN prevlake GDOES testom. Dobiveni rezultati ukazuju na
značajan utjecaj načina šaržiranja obratka na kvalitetu prevlake i njenu debljinu.

Abstract (english)

Theoretical part of this thesis describes the CVD process, its physical and chemical
fundamentals, classification, advantages and disadvantages, application. A detailed
description of the PACVD process follows, with special emphasis on the ions’ energy
(plasma) impact and sample’s position and geometry in PACVD reactor on the quality of
coating.
In the experimental part of the thesis, next to TiN coating parameters and the base
material’s (X38CrMoV5–3) composition, test methods, results and their mutual influence are
analyzed in depth, and include coating adhesion quality via Rockwell C test, coating thickness
via calotester and TiN coating’s chemical composition via GDOES test. The results point to a
significant influence of the workpiece charging on the quality of the coating and its thickness.

• Keywords: PACVD; prionjivost; debljina prevlake; kemijski sastav prevlake; TiN prevlaka
• Keywords (english): PACVD; coating adhesion; thickness; chemical composition; TiN coating
• Language: croatian
• URN:NBN: urn:nbn:hr:235:553516
• Study programme: Title: Mechanical Engineering and Naval Architecture - specialist; Study programme type: university; Study level: postgraduate specialist; Academic / professional title: sveučilišni/a specijalist/specijalistica strojarstva i brodogradnje (sveučilišni/a specijalist/specijalistica strojarstva i brodogradnje)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Open access
• Created on: 2021-05-26 12:39:27