Provjera točnosti pomaka piezo aktuatora

master's thesis

• Title (english): Displacement accuracy testing of piezo actuator
• Author: Marko Ivšić Vuković
• Mentor: Gorana Baršić (mentor)
• Granter: University of Zagreb; Faculty of Mechanical Engineering and Naval Architecture; Zagreb
• Defense date and country: 2020-12-03, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Mechanical Engineering

Abstract

U ovom radu dan je prijedlog postava za umjeravanje piezo aktuatora, korištenjem laserskog interferencijskog mjernog sustava Renishaw ML10. S umjerenim piezo aktuatorom moguće je umjeravati gotovo sve izvedbe elektromagnetskih ticala, ali u ovom radu obrađena je primjena za umjeravanje ticala uređaja za mjerenje kružnosti. Ukoliko bi se ticalo uređaja za mjerenje kružnosti postavilo neposredno uz tj. na retroreflektor interferencijskog sustava omogućilo bi umjeravanje ticala za mjerenje kružnosti direktno s laserskim interfereometarskim mjernim sustavom. Isto tako, moguće je provesti umjeravanje ticala za mjerenje kružnosti, primjenom piezo aktuatora koji mora biti prethodno umjeren predloženim mjernim postavom.
U prvom dijelu ovog rada, dana je teorijska osnova mjerenja kružnosti, te načini umjeravanja uređaja za mjerenje kružnosti s naglaskom na umjeravanje ticala.
Zatim je objašnjen način rada piezo aktuatora, te su dane detaljne karakteristike i opis piezo aktuatora PI P – 621.ZCD, te laserskog interferencijskog sustava ML10 koji su korišteni u ovome radu.
Osmišljen je postav za umjeravanje piezo aktuatora pomoću laserskog interferencijskog sustava te su provedena preliminarna mjerenja.
Temeljem analize dobivenih rezultata pokazana je primjenjivost razvijene metode za umjeravanje pomaka piezo aktuatora.

Abstract (english)

This thesis proposes a setup for calibration of piezo actuator by using laser interferometer measuring system named Renishaw ML10. By using calibrated piezo actuator, it is possible to calibrate almost every version of electromagnetic tactil measuring probe, but in this thesis, the application of using calibrated tactil measuring probes of the device as a means for measuring circularity was elaborated. If the tactil measuring probe of the measuring circularity device was placed on the retroreflector of the interferometer system, it would enable direct calibration of the tactil measuring probe for measuring circularity with laser interferometer measuring system. Likewise, it is possible to use a pre-calibrated piezo actuator with suggested set up measuring system, to calibrate tactil measuring probes, in order to measure circularity.
In the first part of the thesis, the theoretical explanation of measuring circularity is given, as well as the description of the calibration methods, with an emphasis on tactil measuring probe calibration.
Then, the mode of work of the piezo actuator is explained and detailed characteristics and description are given about piezo actuator PI P-621.ZCD and laser interferometer system ML10, which were both used in this theses.
After that, a setup for piezo actuator calibration was designed with use of laser interferometer system, and preliminary measurements were performed.
Finally, based on the analysis of the obtained results, the applicability of developed method for calibration of piezo actuator displacements is shown.

• Keywords: kružnost; metode; umjeravanje; uređaj; postupak; piezo; aktuator; primjena; tehnologija; specifikacije; interferometar; optika; mjerenje; rezultati
• Keywords (english): roundness; methods; calibration; device; procedure; piezo; actuator; application; technology; specifications; interferometer; optics; measurement; results
• Language: croatian
• URN:NBN: urn:nbn:hr:235:744086
• Study programme: Title: Mechanical Engineering; Study programme type: university; Study level: graduate; Academic / professional title: magistar/magistra inženjer/inženjerka strojarstva (magistar/magistra inženjer/inženjerka strojarstva)
• Type of resource: Text
• File origin: Born digital
• Access conditions: Open access
• Created on: 2020-11-27 09:03:12